Tegal Receives Order for 980ACS Series Plasma Etch System from Leading European Telecom Device Firm
Thursday November 18, 8:00 am ET
Follow-on Order is First in Major Fab Expansion
PETALUMA, Calif.--(BUSINESS WIRE)--Nov. 18, 2004--Tegal Corporation (Nasdaq:TGAL - News) today announced that a leading European analog and mixed signal device manufacturer has placed an order for a Tegal 980ACS (Advanced Control System) plasma etch system that will be used for high-volume fabrication in its new 200 mm production facility. This follow-on order was based on the excellent performance of the Tegal 900 and 6500 series tools currently used in production, along with Tegal's VLSI 10 Best Award winning technical support, and process development expertise. The tool purchase is part of a major planned fab expansion.
"Tegal is the tool of record for mainstream etch processes in this advanced wafer fab," said Mike Parodi, Tegal's chairman, president and CEO. "Our 980ACS system provides substantial productivity and cost-of-ownership advantages over competitive tools. Naturally, we are very pleased to be rewarded with a repeat order from this leading device producer. We have also been told to expect additional orders in the coming months."
The Tegal 980ACS is the latest in a series of plasma etch systems produced by Tegal for companies around the world. More than 1,500 systems have been shipped over the years and continue to provide reliable and cost-effective support for a wide range of processes. Popular applications include silicon nitride and oxide dielectric etch in addition to a wide variety of polymer etch treatments. Many of today's MEMS and nano-structure devices require simple, high-throughput plasma processes uniquely served by the 900 and 980 series systems.
Safe Harbor Statement
The statements in this news release are forward-looking statements that involve a number of risks and uncertainties. As discussed in Tegal's annual report on Form 10-K for the fiscal year ended March 31, 2004, assumptions relating to the foregoing involve judgments with respect to, among other things, the ability of Tegal to successfully implement its business strategy; future economic, competitive and market conditions, including those in Europe and Asia and those related to Tegal's strategic markets; whether the products offered by Tegal will continue to achieve customer acceptance, and future business decisions, all of which are difficult or impossible to predict accurately and many of which are beyond the control of Tegal. Although Tegal believes that the assumptions underlying the forward-looking statements are reasonable, any of the assumptions could prove inaccurate and, therefore, there can be no assurance that the results contemplated in the forward-looking statements will be realized. In light of the significant uncertainties inherent in the forward-looking information included herein, the inclusion of such information should not be regarded as a representation by Tegal or any other person that Tegal's objectives or plans will be realized. Tegal undertakes no obligation to revise the forward-looking statements contained herein to reflect such events or circumstances after the date hereof or to reflect the occurrence of unanticipated events.
About Tegal
Tegal provides process and equipment solutions to leading-edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cell phones, PDAs and RFID applications; megapixel imaging chips used in digital and cell phone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits. More information is available on the Internet at: www.tegal.com.
