is 80 according to this article:
www.ledinside.cn/showreport/20180327-43180.html
machine translate:
"...Aixtron currently has a market share of about 90% in the machine platform. The major VCSEL manufacturers are all using Aixtron's G4 platform. All of them use stone disc (graphite) design, and the uniformity of Run to Run will be quite consistent. In addition, in response to the market demand for VCSELs such as 3D sensing, an automated delivery platform is also developed to reduce the number of defects and provide uniformity. At present, thanks to orders, the annual shipment volume is 80 MOCVD..."
www.ledinside.cn/showreport/20180327-43180.html
machine translate:
"...Aixtron currently has a market share of about 90% in the machine platform. The major VCSEL manufacturers are all using Aixtron's G4 platform. All of them use stone disc (graphite) design, and the uniformity of Run to Run will be quite consistent. In addition, in response to the market demand for VCSELs such as 3D sensing, an automated delivery platform is also developed to reduce the number of defects and provide uniformity. At present, thanks to orders, the annual shipment volume is 80 MOCVD..."