BluGlass is now able to use its low temperature Remote Plasma Chemical Vapour Deposition technology to produce n-type gallium nitride (GaN) films with low impurities and good electrical properties equivalent to films grown using the industry standard process – MOCVD.
www.bluglass.com.au/images/stories/pdfs/...n%20june%202012.pdf
"RPCVD has
great potential to improve device performance
simply by growing a low temperature p-GaN layer
which in turn improves the stability of the InGaN
layer during fabrication"
"A second potential for RPCVD is the growth of high
quality InGaN MQW layers at lower temperatures
than MOCVD The RPCVD process could enable
Indium rich MQW layers necessary for green LEDs
and also for PV devices "