New Entegris Integra® Valve Wipes Out Downtime Caused By Weir Valve Corrosion in Ultrapure, Bulk Chemicals, and CMP Slurry Applications

BILLERICA, Massachusetts, July 11, 2017

BILLERICA, Massachusetts, July 11, 2017 /PRNewswire/ -- Entegris, Inc. (NASDAQ: ENTG), a leader in world-class specialty materials, announced today its new Integra® Plus WS (weir style) family of fluid management valves. Created for use with corrosive chemicals in semiconductor processing applications, the new valves are constructed from high-purity, chemically resistant PFA and PTFE and feature a streamlined design to keep the flow path clean and free from contaminants. In addition, its single-piece diaphragm design eliminates potential separation, increasing valve life and reducing downtime for changeouts. As a result, the new Integra valves enable customers to manage high-flow, bulk chemical delivery with improved process reliability.

Photo - https://mma.prnewswire.com/media/534363/Entegris_integra_valves.jpg

"The new Integra valves are optimal for today's larger semiconductor manufacturing facilities that utilize higher chemical volumes, requiring bulk chemical distribution systems with high-flow capabilities, said Senior Vice President and General Manager of the Advanced Materials Handling Division for Entegris, Bill Shaner. "Additionally, the Integra valves offer a smaller footprint – yet still provide high-flow capacity – and can minimize dead volume to enable quick chemical system flush-up."

The new valves also provide:

• A C_V flow over 25—more than twice that of typical poppet-style valves
• Single-piece diaphragm construction, eliminating potential diaphragm separation
• Forward- and backward-compatible configuration for easy, mistake-proof installation
• Two-way configurations with either manual multi-turn or pneumatic "normally closed"
  or "normally open" actuators

Integra Plus WS valves are available now with fully characterized standard PrimeLock®, Flaretek® "SpaceSaver" and PureBond® pipe port connections. They provide system flexibility and easy installation into any fluid handling system.  

For more information, please visit the Entegris product display area during SEMICON® West at the W Hotel near the Moscone Center in San Francisco, July 11 – 13, or visit the product web page at www.entegris.com/integraplusws.