Axcelis Appoints Dr. Russell Low New Executive Vice President Of Engineering

BEVERLY, Mass., Oct. 31, 2016

"I am very pleased that Russell has joined the Axcelis leadership team," said Mary Puma, president and CEO of Axcelis Technologies.  "Axcelis' organizational structure is evolving with the company's growing opportunities for its Purion ion implantation systems.  Russell brings to Axcelis a unique blend of technical and leadership skills gained over a distinguished career in the semiconductor and solar capital equipment industries.  In particular, his expertise in implanter platform technology, including ion source and dosimetry systems, is expected to accelerate the company's market share gains through technology leadership."

Puma continued, "Russell will work closely with Bill Bintz, who will shift his main focus back to the marketing area as the EVP, Product Development. Having worked together in the past, Bill and Russell are looking forward to collaborating with Axcelis teams across the business to drive programs that will regain our implant market share leadership."

Dr. Low is a recognized leader in the semiconductor capital equipment market and has demonstrated a track record of success in the engineering function.  He has over 18 years of experience within the semiconductor and solar capital equipment industries, including nine years at Varian Semiconductor and six years at Applied Materials.  Most recently, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments since 2012. Dr. Low received his Ph.D. in Physical Chemistry from Oxford University.  He also holds an Executive MBA from the Massachusetts Institute of Technology, and a BS degree from Southampton University.  He has 43 granted US patents over multiple categories and has authored over 20 refereed papers.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The Company's Internet address is: www.axcelis.com.

Company Contacts:
Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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